高纯过滤器
高纯过滤器
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Controlling contamination in liquid, air and gas process streams enables more productive and technologically superior semiconductor, flat panel displays, data storage, photovoltaic, life sciences, lithium ion battery and other microelectronic manufacturing processes. Entegris provides filtration solutions based on a variety of media and membrane technologies using performance criteria as well as analytical services to detect contamination in technology environments and analyze/validate materials.
AMC Filtration Solutions for chemical filtration of airborne molecular contamination (AMC) | Gas Diffuser Sintered nickel technology with 0.003 µm filtration technology in integrated filters/diffusers | Gas Filtration Nickel, stainless steel and Teflon® filtration technologies for high-purity gas applications |
Liquid Filtration Products Membrane and depth media filtration technologies for chemicals, water, solvents and photochemicals | CMP Slurry Filtration Depth media filters for ceria, alumina and silica slurry |
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